Multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement

• Steven Ian Moore,
• Michael G. Ruppert and
• Yuen Kuan Yong

Beilstein J. Nanotechnol. 2017, 8, 358–371, doi:10.3762/bjnano.8.38

• , M2 and M4 and location 2 for the torsional mode M3. The system response (Vi→Vo) is the combination of a motional and feedthrough component. To observe the motional component feedthrough cancellation is performed offline. A third order transfer function is fitted to the measured frequency response in

• system response with feedthrough cancellation (Vi→Vd). Due to small phase shifts from the op-amp dynamics and unmodeled electrical parasitics, feedthrough cancellation can only be accurately performed in a narrow-band in the vicinity of the mode of interest. To evaluate the effect of the proposed

• small magnitude of resonance response. The parameters of Equation 21 and Equation 23 for each of these transfer functions are tabulated in Table 3. The resulting magnitude responses with the feedthrough cancellation from input voltage Vi to sensor output Vd, are shown in Figure 6i–l (voltage driven) and

High-bandwidth multimode self-sensing in bimodal atomic force microscopy

• Michael G. Ruppert and
• S. O. Reza Moheimani

Beilstein J. Nanotechnol. 2016, 7, 284–295, doi:10.3762/bjnano.7.26

• simultaneously used for multimode excitation and detection of the cantilever deflection. This is achieved by a charge sensor with a bandwidth of 10 MHz and dual feedthrough cancellation to recover the resonant modes that are heavily buried in feedthrough originating from the piezoelectric capacitance. The setup

• fundamental mode, and phase imaging on the higher eigenmode. Keywords: atomic force microscopy; charge sensing; feedthrough cancellation; multimode sensor; piezoelectric cantilever; self-sensing; Introduction Emerging methods in multifrequency atomic force microscopy (MF-AFM) rely on the detection and

• , an impedance analyzer such as the Keysight E4990A was used to measure Cp and the obtained value of 20.27 pF adequately matches the estimation. Feedthrough cancellation The first and the fifth modes are clearly visible in the frequency response shown in Figure 6c albeit excessively buried in